Ultrasonic Clamp-On Flow Sensor
SEMIFLOW® CO.65 and SEMIFLOW® CO.66 PI Ex1 for Non-Contact Flow Measurement on Rigid Plastic Tubes & Pipes
SEMIFLOW CO.65 non-contact clamp-on flow sensors are ideal to measure abrasive, adherent, corrosive, and ultra-pure liquids on rigid plastic tubes and pipes used in the semiconductor industry. Equipped with an integrated electronic unit, they function as a complete flow meter in the size of a small transducer without an external board or transmitter.
For non-contact measurements on flexible plastic tubes the SONOFLOW CO.55 Ultrasonic Clamp-on Flow Meter is the perfect solution.
Product Benefits
- Highly precise ultrasonic clamp-on flow sensor
- Innovative contact-free architecture to eliminate risk of contamination and leakage, thus increasing uptime
- Use at PFA, PTFE or other hard plastic tubes and pipes
- No system downtime in case of sensor exchange or retrofit
- Sensor set for hazardous environments according to ATEX / IECEx (Ex Zone 1)
- Support of all current industrial interfaces
SEMIFLOW® CO.65 Clamp-On Flow Sensor for Semiconductor Applications
Excellent Measurement Performance
- Real-time instantaneous flow measurement and volume totalizing
- Reliable flow measurement up to 400 L/min
- Accuracy of +/- 2%
Technical Sensor Properties
- Plastic housing (PVC-C) and plastic connector (PA)
- Screwed lid and flexible inlay for optimal coupling between tube and transducer
Plug & Play Sensor Fit
- Integrated electronics board and analysis unit
- 8 different sensor sizes (¼", 3/8", ½", (¾"), 1", 1.32“, 40A, 50A OD) for a wide range of tube sizes
- Ideally suited for PFA and other hard plastic tubes and pipes
Easy System Integration
- Easy integration into existing PLC or pump systems via RS-485 interface
- Optional C³ Software to provide user-friendly sensor operation, configuration and calibration
SEMIFLOW® Ex1 Set for Zone 1 According to ATEX / IECEx
The SEMIFLOW Ex1 Set opens a new product category comprising intrinsically safe SEMIFLOW CO.66 PI Ex1 Flow Sensor with control gear Barrier Box ST Ex1 for non-contact liquid flow measurement on rigid plastic tubing in hazardous environments.
SEMIFLOW CO.66 PI Ex1 Flow Meters are protected against explosion hazard by gases, vapors and fogs according to the gas group IIB. The device protection level (EPL) is "Gb" for use in Zone 1 according to ATEX / IECEx.
SEMIFLOW® CO.65 Ultrasonic Clamp-On Flow Sensor: Application Fields
- Single wafer cleaning equipment
- Lithography equipment
- Mixing equipment
- Chemical supply system
- Slurry lines
More Information about Ultrasonic Flow Meters
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